자료유형 | 연속간행물 |
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서명/저자사항 | Journal of vacuum science & technology. B, Microelectronics and nanometer structures : an official journal of the American Vacuum Society. |
단체저자명 | American Vacuum Society. American Institute of Physics. |
권.연차 사항 | 2nd ser., v. 1, no. 1 (Jan.-Mar. 1983)-2nd ser., v. 8, no. 6 (Nov./Dec. 1990). |
발행사항 | New York, N.Y.: Published for the Society by the American Institute of Physics, 1983-. |
형태사항 | 8 v.: ill.; 29 cm. |
간행빈도 | Bimonthly, <Jan./Feb. 1985-> |
이전간행빈도 | Quarterly, Jan.-Mar. 1983- |
축약표제 | J. vac. sci. technol., B. |
부분표제 | Journal of vacuum science and technology. B, Microelectronics and nanometer structures. Microelectronics and nanometer structures. |
선행저록 | Journal of vacuum science and technology, 0022-5355, Journal of vacuum science & technology. B, Microelectronics processing and phenomena |
ISSN | 1071-1023 |
CODEN | JVTBD9 |
일반주기 |
Title from cover.
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색인/초록 수록지 | Computer & control abstracts, 0036-8113, Jan.-March 1983- Electrical & electronics abstracts, 0036-8105, Jan.-March 1983- Physics abstracts. Science abstracts. Series A, 0036-8091, Jan.-March 1983- SPIN, 1983- Chemical abstracts, 0009-2258 Coal abstracts, 0309-4979 Current physics index, 0098-9819 Metals abstracts, 0026-0924 World aluminum abstracts, 0002-6697 |
이용가능한 다른형태자료 | Issued also on microfilm. |
연관저록주기 | Includes: International Symposium on Electron, Ion, and Photon Beams. Proceedings of the ... International Symposium on Electron, Ion, and Photon Beams; and: Molecular Beam Epitaxy Workshop. Proceedings of the ... Molecular Beam Epitaxy Workshop, also issued separately. |
일반주제명 | Vacuum technology -- Periodicals. |
분류기호(DDC) | 533.5 |
언어 | 영어 |
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보존/밀집/기증 자료 신청
No. | 소장처 | 소장사항 | 청구기호 | 구독 | 최근입수호 | 권호·제본정보 보기 |
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1 | 중앙도서관[본관]/4자료실(4층)/ | 533.5 J86aaB | 구독중단 | v.28 n.6 | ||
2 | 중앙도서관[본관]/5자료실(4층)/ | 533.5 J86aaB |