Fundamentals of microfabrication and nanotechnology/ 3rd ed

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자료유형	단행본
서명/저자사항	Fundamentals of microfabrication and nanotechnology/ Marc J. Madou.
개인저자	Madou, Marc J.
판사항	3rd ed.
발행사항	Boca Raton, FL: CRC Press, 2012.
형태사항	3 v.(xiii, 641 ; 656 ; 636 p.): ill. (some col.); 29 cm.
ISBN	9781420055115(v.1): 9781420055191(v.2): 9781420055160(v.3): 1420055119(v.1) 1420055194(v.2) 142005516X(v.3)
서지주기	Includes bibliographical references and index.
내용주기	v.Ⅰ, Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v.Ⅱ, Manufacturing techniques for microfabrication and nanotechnology -- v.Ⅲ, From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
일반주제명	Microelectromechanical systems. Nanoelectromechanical systems. Microfluidics. Solid state physics.
분류기호(DDC)	621.38152
언어	영어